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LTCC process title
Last update 2013.4.19
LTCC image
Advantageous Substrate Technologyfor Module Miniaturization
Glass-ceramics are fired under 1000 degrees, therefore Ag, AgPd and Au can be used as co-fired inner conductor.
In addition, the signal delay becomes shorter due to low dielectric constant which is lower than Alumina substrates.
Because thermal expansion coefficient of LTCC is similar to silicon, it is easy to bond die directly to the pad or to be connected flip chip.
19 layers image
↑ 19 layers
LTCC image3
LTCC image2
LTCC image3
Standard Value of Ceramic Process
Item Standard(Custom)
Dielectric
Layers
Outer Size(mm) ≤ 120 (180)
Thickness / Layer
(mm)
0.05 - 0.3 ≤ 3.5
TOTAL
Total Layers ≤ 10 (30)
Dev. X - Y ± 0.5% (0.2)
Z ± 10% (6)
Warp 10μm / 10mm
(Ra) =
Roughness(Ra)
0.5μm (As Sintered)
0.05μm (Treatment)
Inner
Pattern
Width (mm) ≥ 0.1 (0.05)
Line Spacing (mm) ≥ 0.1 (0.05)
Via Diameter (mm) ≥ 0.1 (0.08)
Via Spacing (mm) ≥ 0.1 (0.05)
Surface
Pattern
Width (mm) ≥ 0.1 (0.05)
Line Spacing (mm) ≥ 0.1 (0.05)
Plating Ni (μm) 3.0 - 5.0
Au (μm) 0.2 - 0.6

Downloads
Design Guide Lines for LTCC (PDF)
Design Kit for Agilent ADS ver.2008-2011(zip)
Installation manual of HIRAI LTCC for Design Kit ver.2011(PDF)
Installation manual of HIRAI LTCC for Design Kit ver.2008-v2(PDF)
New HIRAI LTCC with high Q (PDF)
New IEICE Trans. Electron. Paper (PDF)
New 6'th. Global Symposium on Millimeter Wave(GSMM2013) (PDF)
Overview of HIRAI SK Corp. (PDF)
Loss reduction by air-region insertion to LTCC rectangular-waveguide slot array antenna in the millimeter-wave band (PDF)
IEICE Trans. Commun. 2011 (PDF)
IEEE Antennas and Propagation Society 2011 (PDF)
IEICE Society Conference 2011 (PDF)
Novel Multi-strip Resonator and Filter (PDF)
APMC2009 Paper (PDF)
KJMW2009 Paper (PDF)
Hirai Precision LTCC 2011 (PDF)
Hirai Precision LTCC 2010 (PDF)
Hirai Precision LTCC 2009 (PDF)
Hirai Precision LTCC 2008 (PDF)
Hirai Precision LTCC 2007 (PDF)
Hirai Precision LTCC 2006 (PDF)
Thick Leadframe for Power Devices(PDF)
Novel Multi-strip Resonator and Filter
Multi-strip LTCC resonator BPF
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